Extreme Ultraviolet: Etching the way
This is taken from ZDNet:
"Extreme ultraviolet (EUV) lithography will allow computer makers to draw smaller circuits onto chips than current lithographic techniques. EUV light has a short wavelength, which allows chipmakers to project extremely intricate circuit patterns onto silicon wafers. Chips made by the EUV process are set to come out in 2005 and run at 10GHz"
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